Non-contact mobility measurement device "LEI-1610 Series"
Measurement of various semiconductor carrier transport characteristics is possible! Non-contact mobility measurement using microwave reflection!
For the manufacturing of semiconductor devices, carrier mobility is a very important parameter. The "LEI-1610 Series" is a non-contact mobility measurement device capable of measuring various semiconductor carrier transport characteristics such as mobility, carrier concentration, and sheet resistance. Carrier mobility, sheet resistance, and sheet charge density can be measured non-contact and destructively on Si wafers ranging from 2 inches to a maximum of 8 inches, as well as on compound semiconductor (GaAs, GaN, InP, etc.) epi wafers. 【Features】 ■ Non-contact mobility measurement using microwave reflection ■ Standard measurement device for high-frequency device characteristics ■ High correlation with measurement results from the Hall effect ■ Multi-carrier modeling option *For more details, please refer to the related link page or feel free to contact us.
- Company：日本セミラボ 新横浜本社
- Price：Other
